Clean Air Operation Room

Volatile Organic Compounds Monitoring for Semiconductor Foundry Clean Room Air

Air samples were collected in consecutive days using Summa canisters from semiconductor foundry clean rooms and air entrances. By coupling a NuTech preconcentrator with an Agilent GC-MS, an optimized method for qualitative and quantitative analysis of VOC compounds was developed. Method detection limit (MDL), blank spike (BS) and blank spike duplicate (BSD), etc. were estimated for method valid...

Why Is Clean Air Clean?

Air exhibiting very low concentrations of light-scattering aerosol particles is occasionally observed even in industrialized regions. Evidence is presented that this very clean air results from highly efficient removal of aerosol particles coupled to the removal of water in precipitation.

Soil Air Water CLEAN

Indonesia’s Clean Air Program

Unprecedented industrial development during the last two decades, accompanied by a growing population, has increased the amount of environmental damage in Indonesia. A critical environmental problem is the rising level of air pollution in several large cities. This has stimulated the government to develop a national program designed to control the quantity of pollutants in the air. However, the...

Energy Saving System for Air Conditioning of Clean Room for Semiconductor Factory (Estimation of FMU System)

The total power consumption of all semiconductor plants exceeds 100 million kWh per year, with about 43% of this consumption to operate air conditioning facilities. This high power consumption is due to the requirement of the cleanliness kept for clean rooms, with extremely high power consumed to the air transferring power. Oki developed the fan module unit (FMU) type air conditioning system to...